Optical Process Monitor Optius

s-Optius

Enable to monitor the situation of various processes in real time by measuring an emission spectrum of the plasma. Optimum for feedback control of the MFC by the reactive sputtering process and endpoint detection of the etching process.

Features

Broad measurement wavelength
Measurement wavelength range is 200 to 1000nm, it is also possible to measure simultaneously specified multiple wavelengths
Simultaneous measurement of up to 5ch
Addition of the Expansion unit (ESC) options enable simultaneous measurement of up to 5ch
Feedback control
Feedback control of external equipment by measurement result.
Exclusive software
Exclusive software corresponding to multiple processes including the reactive sputtering and etching is included.
Two kinds of light receiving units
Receiver unit can be selected from atmosphere type or vacuum type depending on the application.

Applications

Feedback control of MFC and process monitoring in reactive sputtering
Ｅndpoint detection by the plasma etching process
Confirmation of the cleaning and initialization status of Etching and CVD equipments

Specifications

Model		Optius
Number of measurement channel		1ch : Main unit (TSC) Maximum 5ch : Add an expansion unit options (ESC)
Wavelength range		200 to 1000nm
Optical resolution *1		1.7nm (FWHM)
Integration time		1 to 1000ms
PID control cycle time		100 to 1000ms
Number of measurement wave length *2		10
Number of wavelengths that PID control is possible *2		1
Number of wavelength operation processing *2		10
Number of discriminant processing *2		10
Analog input	Channel	3ch (Per measurement ch), Max 15ch (At 5ch measurement)
	Signal	Massflow Rate, Power surplly voltage, Pressure level
	Voltage	0 to +5V or 0 to +10V
Analog output	Channel	4ch (Per measurement ch), Max 20ch (At 5ch measurement)
	Signal	Massflow control, Wave length strength, Calculation result
	Voltage	0 to +5V or 0 to +10V
Disital input	Channel	4ch (Per measurement ch), Max 20ch (At 5ch measurement)
	Signal	START, STOP, ABORT
Disital output	Channel	4ch (Per measurement ch), Max 20ch (At 5ch measurement)
	Signal	Valve close, Set point, Pressure alarm, Error
Connection with PC *3		LAN (1000BASE-T/100BASE-TX)
Dimensions (W×D×H)		Main unit (TSC) : 250×300×121mm Expansion unit (ESC) : 50×300×121mm
Weight		Main unit (TSC) : 4.9kg Expansion unit (ESC) : 1.3kg
Power		AC100 to 240V (50/60Hz)
Consumed power		60W (5ch)
Operating environment		Temperature : 10 to 40ºC Humidity : 15 to 80% RH (Non condensing)

*1	This value is a reference.
*2	Number of the simultaneous measurement processing per measurement ch
*3	PC is not included. For the specifications of PC, please refer to the standard specifications.

FEATURES