| μPD400 | μPD2000 | |
| Particle Size | 100μ to 400μ | 100μ to 400μ |
| Capacity | 5L / Batch | 150L / Batch |
| Shelf Temp. Control Range | -40ºC to 60ºC | -50ºC to 60ºC |
| Vacuum Control Range | 5Pa to 30Pa | 5Pa to 30Pa |
| Cold Trap Temp. | -60ºC | -65ºC |
| Required Space | 1500W×1700L×3300H | 5600W×8200L×6800H |