COVOT-LC

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COVOT‐LC

COVOT-LC is a simple and reasonable vacuum transfer robot without the Z-axis.

Features

  • Simple 2 axis robot without the Z axis.
  • Built-in controller enables compact equipment layout.
  • Corresponds to the high vacuum to 10-5Pa.

Applications

  • Automatic wafer transfer for various semiconductor equipments
  • Wafer transfer for various vacuum eqipment for R&D

Specifications

Pressure rangeto 10-5Pa
Wafer size200mm/300mm
Number of wafer1 or 2
Maximum distance*880mm
Rotation-15º to 375º
Z-axis stroke-
Minimum rotation diameter *802mm
Weight capacity (hand is included)1kg
SpeedRMax 2.5sec / full stroke
θMax 2.5sec / 180º
Z-
Position AccuracyR±0.2mm
θ±0.2mm
Z-
Teaching pendantOption
ControllerBuilt-in type

*Changes by the arm and hand.

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FEATURES
COVOT-LC