COVOT-6

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COVOT‐6

COVOT-6 comprises 4 independent arms and is the vacuum transfer robot which realized high throughput.

Features

  • 4 independent arms are equipped, two substrates can be exchanged simultaneously.
  • 7 axis actuators and enables teaching to each of 4 arms.
  • Corresponds to the medium vacuum to 10-1Pa.

Applications

  • Automatic wafer transfer for various semiconductor equipments
  • Wafer transfer for various vacuum eqipment for R&D

Specifications

Pressure rangeto 10-1Pa
Wafer size300mm
Number of wafer4
Maximum distance*880mm
Rotation360º Endless
Z-axis stroke90mm
Minimum rotation diameter *980mm
Weight capacity (hand is included)1kg
SpeedRMax 1.5sec / full stroke
θMax 2.0sec / 180º
ZMax 1.5sec / 20mm
Position AccuracyR±0.2mm
θ±0.2mm
Z±0.2mm
Teaching pendantAttached
ControllerSeparation type

*Changes by the arm and hand.

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FEATURES
COVOT-6