Vacuum Transfer Platform NCH Series

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nch4000

NCH series is vacuum transfer platform that combines robot, core chamber and load lock.

Features

  • Connection port can be broadly chosen from 4 (quadrangle) a maximum of 8 (octagon).
  • Load lock chamber corresponding to 25 slot wafer cassette is equipped standardly.
  • Vacuum pumps and vacuum gauges are options.

Applications

  • Automatic wafer transfer for various semiconductor equipments
  • Wafer transfer for various vacuum eqipment for R&D

Specifications

Wafer sizeMax 300mm
Connection port4 to 8
RobotELEC (COVOT)
Load lock                          25 slot wafer cassette                        
Pump / Vacuum Gauge            Option

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FEATURES
Vacuum Transfer Platform NCH Series