Sputter ion pump is one of the pumps used to generate ultra and extremely-high vacuum. This pump has a simple design with no moving parts to produce wear and vibration. These features make the sputter ion pump the preferred one for the use in accelerators and analysis equipment. ULVAC, Inc. has developed the ACTER series of sputter ion pumps. The ACTER pumps use optimized magnetic field and new ACTER elements to greatly improve the pumping characteristic in the ultra and extremely-high vacuum range and to improve its overall cost performance. As a result of these performance enhancements, the ACTER pumps have been accepted in the accelerator, electron microscope and other scientific field.
